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Compact Vacuum Coating System for Magnetron Sputtering - Model MVU Magna 12
Manufacturer:
NIITM OJSC
Price:
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Description
Type and number of MRUs in the installation:
Magna 11, DC - 2 pcs;
Magna 12, DC - 1 pc, HF - 1 pc;
Group processing of substrates in one technological cycle
(single-sided processing): Ø100 mm - 4 pcs, Ø150 mm - 2 pcs;
(double-sided processing): 60x48 - 6 pcs;
Periodic 90° rotation of the substrate holder;
Number of ion sources - 1 pc;
Microprocessor control system;
Oil-free pumping system;
Consumption power not more than 4,5 kVT.
Magna 11, DC - 2 pcs;
Magna 12, DC - 1 pc, HF - 1 pc;
Group processing of substrates in one technological cycle
(single-sided processing): Ø100 mm - 4 pcs, Ø150 mm - 2 pcs;
(double-sided processing): 60x48 - 6 pcs;
Periodic 90° rotation of the substrate holder;
Number of ion sources - 1 pc;
Microprocessor control system;
Oil-free pumping system;
Consumption power not more than 4,5 kVT.
Specifications
Width
1450 mm
Length
800 mm
Height
1650 mm
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Delivery Time
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Air freight: 14-21 days (for urgent orders)
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