Molecular Layer Deposition System for Functional Nanocoatings and Applications

Molecular layering unit (Atomic Layer Deposition) is designed for layering of functional, canfor nanocoatings with thickness from 1nm on substrates of different materials. Nanocoatings can be oxides, nitrides, fluorides, fulphides, etc. The nanocoatings can be oxides, nitrides, fluorides, etc. Fields of application: -microelectronics; -nanoelectronics; -sensor instrumentation; -solar energy; -sorption-catalytic processes; -membrane technologies; -creation of renewable energy sources; -medicine.