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High-Density Coating Application System NIKA-15102 for Precision Tools

Semiconductor Production Equipment

Manufacturer: LVT+ LLC

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FOB, CIF & EXW terms available

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Description

The coating plant NIKA-15102 is equipped with four linear arc evaporators LDI, is designed for preparation and application of high density coatings (AlTiN, AlTiSiN,TiB2) for end tools and cutting inserts with deposition rate not less than 1.9 microns/h., ion-plasma low-temperature nitriding of workpiece surface, application of various coatings: <ul> <li>- hardening coatings: AlTiN, AlCrN, AlSiTiN, AlSiCrN;</li> <li>multiphase coatings: -TiN/nc-AlN, nc-TiAlN/a-Si3N4, etc;</li> <li>heat-resistant and heat-resistant coatings.</li> <li>surface nitriding</li> </ul>Coating methods and technologies: PVD, CVD, HiPIMS, CAE, CMS, PECVD, PN/C, PARNS, IPVD based on vacuum arc vaporisation (ARC) or similar method. The unit realises the use of combined methods of sputtering by selecting interchangeable technological devices.

The operating manual is available on request.

Specifications

Assignment

Coating unit NIKA-15102 is designed for deposition of high density coatings for end tools and cutting inserts with deposition rate not less than 1.9 microns/hour, for ion-plasma low-temperature nitriding of workpiece surface.

Dustproof

Got it

Type of construction

Stationary

Guaranteed lifetime of the plant

12 months from the date of signing the commissioning certificate of the plant

Warranty shelf life of the system

18 months from the date of delivery

Service life of the plant until decommissioning

5 years

Resources and service life of components and purchased products

are determined in accordance with their operating documents

Climatic designs

GOST 15150-69; GOST 15543-70 at normal values of climatic factors of external environment - UHL for product placement category 4.2.

Execution

By design documentation Coating unit NIKA-15102

Installed capacity

91715 W

Maximum power consumption

No more than 100 kW

Power supply voltage

380(10±15%) V

Power supply connection diagram

TN-C (three-phase four-wire, zero protective conductor and zero protective conductor are combined in one conductor)

Maximum current consumption by phase

138,96 A

Ultimate vacuum

not more than - 0.0006

Chamber pressure 30 minutes after the start of pumping

Not more than 0.005

Air flow after pumping the chamber for 30 min, ncm3/min

Not more than 0.3

Maximum working temperature for heating workpieces

600 °C

Working gases

argon GOST 10157-2016, nitrogen GOST 9293-74, hydrogen GOST 3022-80, air

Number of gas supply channels

5 pcs

Pressure control range by gas flow

0,1-0,5

Working fluid (recommended)

Distilled water, 20% solution of ethyl alcohol in distilled water according to GOST 6709-72

Working fluid volume, l

No more than 15

Cooling water flow rate, m3/hour

max, 1.5

Compressed air flow rate, m3/min

Not more than 0.02

Weight of the unit (excluding the forevacuum unit, cryogenic pump compressor unit, water recycling system,

no more than 2300 kg

Overall dimensions of the unit on the transport base (length x width x height)

max. 2800 x 1230 x 2260 mm

Note: All specifications are provided by the manufacturer and may be subject to change. Please contact us to confirm the latest specifications before placing your order.

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Shipping Terms

FOB Novorossiysk, Russia CIF Available to major ports worldwide EXW Manufacturer's facility, Russia

Delivery Time

Sea freight: 30-60 days (depending on destination) Air freight: 14-21 days (for urgent orders)

Payment Methods

Letter of Credit (L/C) Wire Transfer (T/T) Escrow Services

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High-Density Coating Application System NIKA-15102 for Precision Tools

Description

Specifications

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